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Products |
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C1500 abatement system |
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The C1500 provides Metal Organic and Ammonia abatement for all OMVPE reactors currently on the market. It has a capability of processing significant amounts of ammonia plus additional flows of Hydrogen and Nitrogen from the process tool.
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H2, N2 and NH3 Recycling system |
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Why burn or vent hydrogen to atmosphere? When it can be separated from other gases and recycled. Disposing of ammonia either by burning or neutralizing in an acid bath is costly. Recycling Ammonia represents considerable cost savings reducing consumption by up to 85% The equipment is engineered to accommodate the specific needs of each plant.
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The S100 Abatement system selector
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This is a changeover unit that allows abatement systems to be switched between OMVPE reactors, to facilitate maintenance and flexibility ensuring the up time of production line is the highest possible
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VP100 MO vapor control system |
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The unit measures the MO vapor being picked up from a bubbler by the gas carrier. So any MO saturation variation can be monitored and corrected by automatically altering the carrier flow to the bubbler. The precise mass flow of MO vapor delivered to the process is essential for process consistency and higher yields.
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